Laser interferometers
4 hour laser interferometer
Laser interferometers use phase shifting technology to accurately characterize the three-dimensional morphology of the measured surface, with measurement accuracy of up to 0.06um or even higher, and are widely used for high-precision detection of planar optical components.
Large aperture phase shifting laser interferometer
Laser interferometers use phase shifting technology to accurately characterize the three-dimensional morphology of the measured surface, with measurement accuracy of up to 0.06um or even higher, and are widely used for high-precision detection of planar optical components.
