4 hour laser interferometer
Laser interferometers use phase shifting technology to accurately characterize the three-dimensional morphology of the measured surface, with measurement accuracy of up to 0.06um or even higher, and are widely used for high-precision detection of planar optical components.
Applications
Widely used for high-precision detection of planar optical components.
Features
1. Accurately measure the transmitted and reflected wavefront of optical components with a diameter of 100mm or less.
2. The measurement accuracy and repeatability are comparable to the American Zygo and 4D interferometers.
3. Customized development according to customer requirements.
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Technical Data
Items
Ty
Testing Method
Fischer interference principle
Phase shifting method
Wavelength phase shifting or mechanical phase shifting
Host wavelength
632.8nm (can be customized)
Main camera resolution
2048*2048
Measuring caliber Main camera focusing ability
Main camera acquisition speed
50Hz
Transmission plane reference mirror shape error
Poor (PV)
λ/10
Reflection plane reference mirror shape error
Poor (PV)
≦ λ/10(can be customized to λ/20)
Cavity accuracy (PV)
≦ λ/10， λ=632.8nm
Repeatability of surface error measurement
(RMS)
≦ 1nm (2δ)
Measuring high parallelism optical elements
Transmission and reflection wavefront
Support
Standard accessories
Computer, stripe monitoring and analysis software
Coherence length
1.0m (if beam is expanded, this parameter will become longe)
Operating temperature requirements
22℃ ±1℃
Working temperature fluctuation requirements
Less than 1 ℃ change per hour
Working humidity requirements
55%±10%RH
isolation requirements
Air floating platform, natural frequency: 1-2Hz
working voltage
AC 110-220V,50/60Hz
