Large aperture phase shifting laser interferometer
The laser interferometer uses phase shift technology to accurately characterize the three-dimensional morphology of the measured surface, with a measurement accuracy of Pv up to 0.06 μ M is even higher and widely used for high-precision detection of planar optical components.
Applications
Widely used for high-precision detection of planar optical components.
Features
--Accurately measure the transmitted and reflected wavefronts of large aperture optical components.
--The measurement accuracy and repeatability are comparable to the American Zygo and 4D interferometers.
--Customized development according to customer requirements.
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主要技术指标
